JPH0364715B2 - - Google Patents

Info

Publication number
JPH0364715B2
JPH0364715B2 JP11184883A JP11184883A JPH0364715B2 JP H0364715 B2 JPH0364715 B2 JP H0364715B2 JP 11184883 A JP11184883 A JP 11184883A JP 11184883 A JP11184883 A JP 11184883A JP H0364715 B2 JPH0364715 B2 JP H0364715B2
Authority
JP
Japan
Prior art keywords
diameter
members
buttful
buffle
cryopump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11184883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS606087A (ja
Inventor
Kyoshi Oshii
Hidetoshi Morimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Cryogenics Inc
Original Assignee
Ulvac Cryogenics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Cryogenics Inc filed Critical Ulvac Cryogenics Inc
Priority to JP11184883A priority Critical patent/JPS606087A/ja
Publication of JPS606087A publication Critical patent/JPS606087A/ja
Publication of JPH0364715B2 publication Critical patent/JPH0364715B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP11184883A 1983-06-23 1983-06-23 クライオポンプにおけるバツフル装置 Granted JPS606087A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11184883A JPS606087A (ja) 1983-06-23 1983-06-23 クライオポンプにおけるバツフル装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11184883A JPS606087A (ja) 1983-06-23 1983-06-23 クライオポンプにおけるバツフル装置

Publications (2)

Publication Number Publication Date
JPS606087A JPS606087A (ja) 1985-01-12
JPH0364715B2 true JPH0364715B2 (en]) 1991-10-08

Family

ID=14571677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11184883A Granted JPS606087A (ja) 1983-06-23 1983-06-23 クライオポンプにおけるバツフル装置

Country Status (1)

Country Link
JP (1) JPS606087A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1914423A2 (en) * 1998-01-22 2008-04-23 Ebara Corporation Trap apparatus and trap system
JP6057782B2 (ja) * 2013-03-05 2017-01-11 住友重機械工業株式会社 クライオポンプ

Also Published As

Publication number Publication date
JPS606087A (ja) 1985-01-12

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